VSL-VCL-Vacuum transducer-Pirani-Piezo-Loadlock

Thyracont-Smartline-Vacuum-Transducers-VSP64E-3055-59-80

VCL Vacuum Transducer for Loadlocks ● abs. 1200 to 5e-4 mbar ● rel. -1060 … +340 mbar ● PtRh ● digital

Name: VCL Vacuum Transducer for Loadlocks ● abs. 1200 to 5e-4 mbar ● rel. -1060 … +340 mbar ● PtRh ● digital
SKU: 245703
Availability: InStock

€ 668.00 – € 1,036.00 excl. VAT and transport costs

The digital vacuum transducer VCL was purpose-developed for load lock applications. The metal sealed vacuum gauge works with a multi sensor technology and combines two piezo sensors with a pirani sensor. So absolute pressure in the range 1200…5e-4 mbar and the pressure relative to the environment in the range of -1060 … +340 mbar are measured.

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SKU: N/A Category: Smartline digital vacuum transducers Tags: -1060 … +340 mbar (rel.), 0-10V Output, 1200 - 1e-4 mbar, Combination sensors, Display, EtherCAT, for corrosive media, Piezo, Pirani, Profinet, RS485, Vacuum transducer

Overview VCL vacuum transducer for load locks:

Integrated Multi Sensor System: Two piezo diaphragm sensors to monitor chamber pump-down and vent-up; Pirani sensor measuring down to 1e-4 mbar controls low-pressure transfer between loadlock and process chamber minimizing particle events
On the point: Differential pressure output for precisely triggering door-open function
Precise: High accuracy, optimal resolution and excellent stability
Fast: Short response time of up to 40 ms
Stable measurements: Due to optimized temperature compensation
Measurements independent of gas type: Above 20 mbar

Overview Smartline vacuum transducers:

Variety of interfaces: Digital RS485 interfaces plus 0-10 V output signal, EtherCAT or Profinet. The Bluetooth adapter SLKBT enables wireless communication
Exchangeable sensor heads: Is an easy job, independent of the gauge manufacturer and without programming effort. If the existing cables shall further be used, suitable adapters (e. g. FCC68) will be available.
Optional display: Large LCD display (exc. EtherCAT, Profinet)
Easy adjustment: Readjustment of zero and atmosphere by push-button or interface
LEDs: For device status and switch points
Scaleable output characteristics: The 0-10 V output signal can be scaled according to the required output characteristics. Thus an exchange of existing vacuum gauges is easily, independent of the manufacturer and without programming effort possible. If the cable needs to remain but the transducer should be changed adapters (e. g. FCC68) are available.
UHV suitable: Metal sealed stainless steel sensor cell,suitable for UHV applications (He leackage rate <5e-10 mbar l / s)
Relay switch points: Two independent, potentialfree relay switch points (exc. EtherCAT, Profinet)
Robust: Resistant, EMC compatible metal housing, protection class up to IP54
Controller: Expansion with 2 channel controller VD12 or 4 channel controler VD14 possible
VacuGraphTM Windows software: For visualisation, analysis and storage of measuring data

Do you have questions regarding our VCL vacuum transducers with Piezo/Pirani sensor for corrosive media? We will be pleased to assist.

Attention: If the Smartline transducer is used without PLC, an SLN4 power supply will be required.

→ Go to all vacuum transducers of the Smartline | → Go to accessories for all Smartline vacuum transducers

Weight	1.1 kg
Dimensions	25 × 16 × 9 cm
Measurement principle	Piezo-resistive / heat conduction Pirani (Pirani, depending on gas type)
Measurement range mbar	1200 – 5e-4 mbar, Relative pressure -1060 … +340 mbar (depending on ambient pressure)
Measurement range Torr	900 – 5e-4 Torr, Relative pressure: -795 … +255 Torr
max. overload	4 bar abs.
Accuracy	Absolute: 1200 – 10 mbar: 0.3 % f. s., 10 – 1e-2 mbar: 10 % f. r., Relative: 0.25 % f. spane
Repeatability	1200 – 10 mbar: 0.1 % f. s., 10 – 1e-2 mbar: 5 % f. r.
Materials in contact with vacuum	Stainl. steel 1.4307, platinum/rhodium, nickel, glass, gold, silicon oxide
Response time	40 ms
Operating temperature	+5…+60°C (Profinet +5…+50°C)
Storage temperature	-40…+65°C
Bake out temperature	max 125 °C at the flange (power supply switched off)
Voltage supply	20 – 30 VDC
Power consumption	Max. 2.5 W, add. 0.8 W for EtherCAT / relays /LCD, 1.6 W for Profinet
Output signal	0-10 V
Output Signal (detailed)	0-10 VDC, min. 10 kΩ, measuring range 2.2 to 8.58 VDC, log. (Default) except for EtherCAT, Profinet
Serial interface	RS485: 9.6 kBd to 115 kBd, 8 databit, 1 stopbit, no parity, EtherCAT, Profinet
Switching output	2x relay, potential free, 49 VAC / 2 A or 30 VDC / 2 A, max. 60 VA except for EtherCAT, Profinet
Electrical connection	RS485/0-10V: SubD, 15-pole, male, RS485/EtherCAT/Profinet: 1x M12 A / 2x M12 D, female
Vacuum connection	DN 16 ISO-KF (VCL53), DN 16 CF-F (VCL54)
Protection class	Up to IP54 (SubD with XB15SL05 adaptor)
Weight	195 g (VCL53D)

Description	Data sheet RS485 interface with 0-10 V, EtherCAT or Profinet	Manual D/DL RS485, 0-10 V	Manual E RS485, EtherCAT	Manual PN RS485, Profinet, until SNo 22xxxxxx	Manual PN RS485, Profinet, with SNo 23xxxxxx
VCL5X Vacuum transducer Loadlock Piezo/Pirani	All options	VCL53D/VCL53DL/VCL54D/VCL54DL	VCL53E/VCL54E	VCL53PN/VCL54PN	VCL53PN/VCL54PN
EtherCAT Communication Manual			VCL53E/VCL54E

Smartline Product Family

Smartline digital Vacuum gauges

How can I program parameters like switching points or gas type correctional factors?

The Smartline vacuum transducers are programmed via their RS485 interface. They respond e. g. on type requests, measurement requests, adjustment commands and commands for gas type correctional factor. It is also possible to program both relay switchpoints of the gauge via RS485.

Is the measuring signal independent of the gas type within the rough vacuum range?

Yes it is in the pressure range above 15 mbar.

Is the Pirani sensor protected against pollution and dirt?

All Thyracont Pirani sensors are fitted with a cover which protects against basic condensation and pollution. If the sensors are used in an extremely polluted environment, it is advised to additionally either use an extension pipe, an elbow fitting, a cooling trap or a seal ring with a sinter filter. We recommend to keep the transducer continously switched on because a hot Pirani filament reduces the sensitivity against contamination.

Is it possible to clean the Pirani sensor?

Depending on the type and intensity of the pollution, it is feasible to clean the sensor with isopropanol. In order to do so, you need to fill the measuring cell completely with isopropanol and let it rest for a few minutes. After removal of the fluid, it is necessary for the cell to completely dry out. Please note that if e.g. oil debris is baked onto the filament, it is very tough or even impossible to clean.

Do I have to mount the instrument into a specific position?

The instruments can be mounted in every position. The best accuracy is achieved if the flange of the instrument is mounted horizontally because the instruments are calibrated in this position. It is not recommended to mount the sensor at the bottom of a pipe as condensate and dirt could be collected in the sensor cell.

How often do I need to recalibrate the compact vacuum meter?

The period between calibrations depends on the specific application. Especially in cases of coatings and contaminations on the sensor-head or if it is used in extreme temperature conditions, readjust of the instrument can be neccessary. For quality assurance matters, we recommend to return the instrument for calibration every one or two years. We can offer a works calibration (article no. ADJCERT) or a DAkkS calibration (article no. DKDCERT).

Is it possible to exchange the sensor heads of the transducers?

The exchangeable, pre-adjusted Smartline replacement sensors can be exchanged fast and easy by the user to assure best compatibility. Loosen the attachment screws around the head, exchange the sensor-head and reattach the attachment screws. After a heating-up phase of 15 minutes press the “Adjust” button, the sensor system and the electronics will be aligned automatically and the transmitter is ready to use.

What is the difference in applications between a cold cathode and a hot cathode gauges?

Hot cathode transducers are mainly used for measurements where high precision (<15%) is needed. For measurements in the ultra-high-vacuum range down to 5e-10 mbar we also recommend our hot cathode. Cold cathode transducers are more durable in numerous applications and therefore relevant for environments where the sensor is exposed to dust, oil or other pollution. The cold cathode measuring cell can be partly disassembled and cleaned (e.g. with Scotch Brite). The VSM and VSI cold cathodes are not quite as precise as a hot cathode transducer. However, the resolution and precision of both gauges is still excellent for a cold cathode sensor (<25%). If necessary the sensor heads of all transducers can be changed to assure a high plant availability.

Is it possible to clean the sensor head of the VSM?

Yes, it is possible to partly disassemble the sensor head and clean it with Scotch Brite. Metallic debris and minor pollution can be cleaned like this easily.

Is it possible to clean the sensor head of the VSH?

Hot cathode sensors are not suited for cleaning.

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VCL Vacuum Transducer for Loadlocks ● abs. 1200 to 5e-4 mbar ● rel. -1060 … +340 mbar ● PtRh ● digital

Overview VCL vacuum transducer for load locks:

Overview Smartline vacuum transducers:

Further relevant products

SLN4 Plug-in power supply ● 24 V ● for Smartline Transducers

DCERT Works Calibration, digital

SLKBT Interface Converter RS485-Bluetooth

SLZUB Accessory Set ● for Smartline Vacuum Transducers

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VCL Vacuum Transducer for Loadlocks ● abs. 1200 to 5e-4 mbar ● rel. -1060 … +340 mbar ● PtRh ● digital

Overview VCL vacuum transducer for load locks:

Overview Smartline vacuum transducers:

Related products

Further relevant products