VCL Vacuum Transducer for Loadlocks ● abs. 1200 to 5e-4 mbar ● rel. -1060 … +340 mbar ● PtRh ● digital

The digital vacuum transducer VCL was purpose-developed for load lock applications. The metal sealed vacuum gauge works with a multi sensor technology and combines two piezo sensors with a pirani sensor. So absolute pressure in the range 1200…5e-4 mbar and the pressure relative to the environment in the range of -1060 … +340 mbar are measured.

Overview Smartline vacuum transducers:

• Variety of interfaces: Digital RS485 interfaces plus 0-10 V output signal, EtherCAT or PROFINET. The Bluetooth adapter SLKBT enables wireless communication
• Industry 4.0: All Smartline transducers offer a series of parameters for preventive maintenance. PROFINET transducers are able to communicate with OPC UA servers and support MRP
• Exchangeable sensor heads: Is an easy job, independent of the gauge manufacturer and without programming effort. If the existing cables shall further be used, suitable adapters (e. g. FCC68) will be available.
• Optional display: Large LCD display (exc. EtherCAT, PROFINET)
• Easy adjustment: Readjustment of zero and atmosphere by push-button or interface
• LEDs: For device status and switch points
• Scaleable output characteristics: The 0-10 V output signal can be scaled according to the required output characteristics. Thus an exchange of existing vacuum gauges is easily, independent of the manufacturer and without programming effort possible. If the cable needs to remain but the transducer should be changed adapters (e. g. FCC68) are available.
• UHV suitable: Metal sealed stainless steel sensor cell,suitable for UHV applications (He leackage rate <5e-10 mbar l / s)
• Relay switch points: Two independent, potentialfree relay switch points (exc. EtherCAT, PROFINET)
• Robust: Resistant, EMC compatible metal housing, protection class up to IP54
• Controller: Expansion with 2 channel controller VD12 or 4 channel controler VD14 possible
• VacuGraph^TM Windows software: For visualisation, analysis and storage of measuring data

Overview VCL vacuum transducer for load locks:

• Integrated Multi Sensor System: Two piezo diaphragm sensors to monitor chamber pump-down and vent-up; Pirani sensor measuring down to 1e-4 mbar controls low-pressure transfer between loadlock and process chamber minimizing particle events
• On the point: Differential pressure output for precisely triggering door-open function
• Precise: High accuracy, optimal resolution and excellent stability
• Fast: Short response time of up to 40 ms
• Stable measurements: Due to optimized temperature compensation
• Measurements independent of gas type: Above 20 mbar

Do you have questions regarding our VCL vacuum transducers with Piezo/Pirani sensor for corrosive media? We will be pleased to assist.

Attention: If the Smartline transducer is used without PLC, an SLN4 power supply will be required.

→ Go to all vacuum transducers of the Smartline | → Go to accessories for all Smartline vacuum transducers