Thyracont VSL Vakuum-Transmitter, Pirani/ Piezo, für Loadlocks, abs. 1200 bis 1e-4 mbar, rel. -1060 bis +340 mbar, digital / Thyracont VSL vacuum transducer, Pirani/Piezo for load locks , 1000 to 5e-9 mbar, abs. 1200 bis 1e-4 mbar, rel. -1060 bis +340 mbar, digital

Thyracont VSP Vakuumtransmitter, Pirani, 1000 bis 1e-4 mbar, digital / Thyracont VSP Vacuum Transducer, Pirani, 1000 to 1e-4 mbar, digital.

VSL Vakuumtransmitter Abmessungen / VSL vacuum transducer dimensions

VCL Vacuum Transducer for Loadlocks ● abs. 1200 to 5e-4 mbar ● rel. -1060 … +340 mbar ● PtRh ● digital

€ 701.00 – € 1,044.00 excl. VAT and transport costs

The digital vacuum transducer VCL was purpose-developed for load lock applications. The metal sealed vacuum gauge works with a multi sensor technology and combines two piezo sensors with a pirani sensor. So absolute pressure in the range 1200…5e-4 mbar and the pressure relative to the environment in the range of -1060 … +340 mbar are measured.

Material Number:

Clear

Compare

Request a quote

SKU: N/A Categories: Smartline digital vacuum transducers, Vacuum Transducers Tags: -1060 … +340 mbar (rel.), 0-10V Output, 1200 - 1e-4 mbar, Combination sensors, Display, EtherCAT, for corrosive media, Piezo, Pirani, Profinet, RS485, Vacuum transducer

Overview Smartline vacuum transducers:

Variety of interfaces: Digital RS485 interfaces plus 0-10 V output signal, EtherCAT or PROFINET. The Bluetooth adapter SLKBT enables wireless communication
Industry 4.0: All Smartline transducers offer a series of parameters for preventive maintenance. PROFINET transducers are able to communicate with OPC UA servers and support MRP
Exchangeable sensor heads: Is an easy job, independent of the gauge manufacturer and without programming effort. If the existing cables shall further be used, suitable adapters (e. g. FCC68) will be available.
Optional display: Large LCD display (exc. EtherCAT, PROFINET)
Easy adjustment: Readjustment of zero and atmosphere by push-button or interface
LEDs: For device status and switch points
Scaleable output characteristics: The 0-10 V output signal can be scaled according to the required output characteristics. Thus an exchange of existing vacuum gauges is easily, independent of the manufacturer and without programming effort possible. If the cable needs to remain but the transducer should be changed adapters (e. g. FCC68) are available.
UHV suitable: Metal sealed stainless steel sensor cell,suitable for UHV applications (He leackage rate <5e-10 mbar l / s)
Relay switch points: Two independent, potentialfree relay switch points (exc. EtherCAT, PROFINET)
Robust: Resistant, EMC compatible metal housing, protection class up to IP54
Controller: Expansion with 2 channel controller VD12 or 4 channel controler VD14 possible
VacuGraph^TM software: For visualisation, analysis and storage of measuring data

Overview VCL vacuum transducer for load locks:

Integrated Multi Sensor System: Two piezo diaphragm sensors to monitor chamber pump-down and vent-up; Pirani sensor measuring down to 1e-4 mbar controls low-pressure transfer between loadlock and process chamber minimizing particle events
On the point: Differential pressure output for precisely triggering door-open function
Precise: High accuracy, optimal resolution and excellent stability
Fast: Short response time of up to 40 ms
Stable measurements: Due to optimized temperature compensation
Measurements independent of gas type: Above 20 mbar

Do you have questions regarding our VCL vacuum transducers with Piezo/Pirani sensor for corrosive media? We will be pleased to assist.

Attention: If the Smartline transducer is used without PLC, an SLN4 power supply will be required.

→ Go to all vacuum transducers of the Smartline | → Go to accessories for all Smartline vacuum transducers

Weight	1.1 kg
Dimensions	25 × 16 × 9 cm
Measurement principle	Piezo-resistive / heat conduction Pirani (Pirani, depending on gas type)
Measurement range mbar	1200 – 5e-4 mbar, Relative pressure -1060 … +340 mbar (depending on ambient pressure)
Measurement range Torr	900 – 5e-4 Torr, Relative pressure: -795 … +255 Torr
max. overload	4 bar abs.
Accuracy	Absolute: 1200 – 10 mbar: 0.3 % f. s., 10 – 1e-2 mbar: 10 % f. r., Relative: 0.25 % f. spane
Repeatability	1200 – 10 mbar: 0.1 % f. s., 10 – 1e-2 mbar: 5 % f. r.
Materials in contact with vacuum	Stainl. steel 1.4307, platinum/rhodium, nickel, glass, gold, silicon oxide
Response time	40 ms
Operating temperature	+5…+60°C (Profinet +5…+50°C)
Storage temperature	-40…+65°C
Bake out temperature	max 125 °C at the flange (power supply switched off)
Voltage supply	20 – 30 VDC
Power consumption	Max. 2.5 W, add. 0.8 W for EtherCAT / relays /LCD, 1.6 W for Profinet
Output signal	0-10 V
Output Signal (detailed)	0-10 VDC, min. 10 kΩ, measuring range 2.2 to 8.58 VDC, log. (Default) except for EtherCAT, Profinet
Serial interface	RS485: 9.6 kBd to 115 kBd, 8 databit, 1 stopbit, no parity, EtherCAT, Profinet
Switching output	2x relay, potential free, 49 VAC / 2 A or 30 VDC / 2 A, max. 60 VA except for EtherCAT, Profinet
Electrical connection	RS485/0-10V: SubD, 15-pole, male, RS485/EtherCAT/Profinet: 1x M12 A / 2x M12 D, female
Vacuum connection	DN 16 ISO-KF (VCL53), DN 16 CF-F (VCL54)
Protection class	Up to IP54 (SubD with XB15SL05 adaptor)
Weight	195 g (VCL53D)


Smartline - product brochure	Download
VacuGraph software (free Lite-Version)	Download
Data sheets, manuals, 3D models and more	Go to downloadcenter

Smartline Product Family Smartline digital Vacuum gauges
How can I set parameters like switching points or gas type correction factors? The Smartline vacuum transducers are programmed via their RS485 interface. They respond e. g. on type requests, measurement requests, adjustment commands and commands forsetting gas type correction factors. It is also possible to program both relay switching points of the gauge via RS485.
Is the measuring signal independent of the gas type within the rough vacuum range? Yes, in the pressure range above 15 mbar.
Is the Pirani sensor protected against pollution and dirt? All Thyracont Pirani sensors are fitted with a cover which protects against basic condensation and pollution. If the sensors are used in an extremely polluted environment, it is advised to additionally either use an extension pipe, an elbow fitting, a cooling trap or a seal ring with a sinter filter. We recommend keeping the transducer switched on permanently, as a hot Pirani filament is less susceptible to contamination.
Is it possible to clean the Pirani sensor? Depending on the type and intensity of the pollution, it is feasible to clean the sensor with isopropanol. To do so, you need to fill the measuring cell completely with isopropanol and let it rest for a few minutes. After removing the fluid, the measuring must dry out completely. Please note that if e.g. oil debris is baked onto the filament, it is very difficult or even impossible to clean.
Do I have to mount the instrument in a specific position? In principle, the devices can be installed in any position. You will achieve the most accurate measurement results if the flange of the device is horizontal, as the devices have been calibrated in this position. Mounting the sensor from below is not recommended, as condensation and dirt can collect in the measuring cell.
How often do I need to recalibrate the vacuum transducer? The period between calibrations depends on the specific application. In particular, deposits and dirt in the sensor, but also use under extreme temperature conditions, can make readjustment necessary. For quality assurance, we recommend sending the devices in for calibration every one or two years. We offer a factory calibration (article no. ADJCERT) or a DAkkS calibration (article no. DKDCERT).
How can I change the sensor heads of the transducers? The replaceable, pre-adjusted sensor heads of the Smartline transmitters can be replaced quickly and easily by the user to ensure consistently high system availability. To do this, the fixing screws of the sensor head are loosened, the sensor unit replaced and the screws refastened. After a warm-up time of approx. 15 minutes, press the Adjust button. The sensors and electronics are now automatically adjusted to each other and the transmitter is ready for operation.
When to use a hot cathode and when to use a cold cathode? Hot cathode transducers are mainly used for measurements where high precision (<15%) is required. We also recommend our hot cathode for measurements in the ultra-high-vacuum range down to 5e-10 mbar. Cold cathode transducers are more robust in numerous applications and therefore particularly interesting for applications where the sensor is exposed to dust, oil or other pollution. The cold cathode measuring cell can be patrially dismantled and cleaned (e.g. with Scotch Brite). Compared to the VSH, the VSM has a lower, but for a cold cathode very good accuracy of <25%. To ensure high system availability, the sensor head of both transmitters can be easily replaced if necessary.
Is it possible to clean the sensor head of the VSM? Yes, it is possible to partly dismantle the sensor head and to carefully clean it with Scotch Brite. Thereby, metallic debris and minor pollution can be easily removed.
Is it possible to clean the sensor head of the VSH? Hot cathode sensors are not suited for cleaning.

Smartline Product Family

Smartline digital Vacuum gauges

How can I set parameters like switching points or gas type correction factors?

The Smartline vacuum transducers are programmed via their RS485 interface. They respond e. g. on type requests, measurement requests, adjustment commands and commands forsetting gas type correction factors. It is also possible to program both relay switching points of the gauge via RS485.

Is the measuring signal independent of the gas type within the rough vacuum range?

Yes, in the pressure range above 15 mbar.

Is the Pirani sensor protected against pollution and dirt?

All Thyracont Pirani sensors are fitted with a cover which protects against basic condensation and pollution. If the sensors are used in an extremely polluted environment, it is advised to additionally either use an extension pipe, an elbow fitting, a cooling trap or a seal ring with a sinter filter. We recommend keeping the transducer switched on permanently, as a hot Pirani filament is less susceptible to contamination.

Is it possible to clean the Pirani sensor?

Depending on the type and intensity of the pollution, it is feasible to clean the sensor with isopropanol. To do so, you need to fill the measuring cell completely with isopropanol and let it rest for a few minutes. After removing the fluid, the measuring must dry out completely. Please note that if e.g. oil debris is baked onto the filament, it is very difficult or even impossible to clean.

Do I have to mount the instrument in a specific position?

In principle, the devices can be installed in any position. You will achieve the most accurate measurement results if the flange of the device is horizontal, as the devices have been calibrated in this position. Mounting the sensor from below is not recommended, as condensation and dirt can collect in the measuring cell.

How often do I need to recalibrate the vacuum transducer?

The period between calibrations depends on the specific application. In particular, deposits and dirt in the sensor, but also use under extreme temperature conditions, can make readjustment necessary. For quality assurance, we recommend sending the devices in for calibration every one or two years. We offer a factory calibration (article no. ADJCERT) or a DAkkS calibration (article no. DKDCERT).

How can I change the sensor heads of the transducers?

The replaceable, pre-adjusted sensor heads of the Smartline transmitters can be replaced quickly and easily by the user to ensure consistently high system availability. To do this, the fixing screws of the sensor head are loosened, the sensor unit replaced and the screws refastened. After a warm-up time of approx. 15 minutes, press the Adjust button. The sensors and electronics are now automatically adjusted to each other and the transmitter is ready for operation.

When to use a hot cathode and when to use a cold cathode?

Hot cathode transducers are mainly used for measurements where high precision (<15%) is required. We also recommend our hot cathode for measurements in the ultra-high-vacuum range down to 5e-10 mbar. Cold cathode transducers are more robust in numerous applications and therefore particularly interesting for applications where the sensor is exposed to dust, oil or other pollution. The cold cathode measuring cell can be patrially dismantled and cleaned (e.g. with Scotch Brite). Compared to the VSH, the VSM has a lower, but for a cold cathode very good accuracy of <25%. To ensure high system availability, the sensor head of both transmitters can be easily replaced if necessary.

Is it possible to clean the sensor head of the VSM?

Yes, it is possible to partly dismantle the sensor head and to carefully clean it with Scotch Brite. Thereby, metallic debris and minor pollution can be easily removed.

Is it possible to clean the sensor head of the VSH?

Hot cathode sensors are not suited for cleaning.