• Vacuum monitoring
• Process control
• Gas inlet control and regulation

Bte Bedampfungstechnik GmbH specializes in the coating of optical components for technical applications. These optical coatings allow precise control of properties such as reflection or transmission – both for specific wavelength ranges and at various angles of incidence. To achieve this, metals (gold, silver, aluminum) or so-called dielectrics (TiO₂, SiO₂) are evaporated in a high vacuum.

Requirements

To ensure the proper execution of the evaporation process, it is essential to monitor and control the pressure in both the fore-vacuum chamber and the high-vacuum chamber. Only if the pressure is within a defined range, a high quality of the vaporized products can be guaranteed.

Suitable Products

VSH88D: The digital vacuum transducer with a combined Pirani/hot cathode sensor measures absolute pressure in the entire range from atmosphere to ultra-high vacuum. By activating the hot cathode only at low pressure, the sensor's lifespan is significantly extended. The transducer features adjustable, independent gas correction factors for both the Pirani and hot cathode sensors, offering excellent accuracy and repeatability.

VSP63MV: The Pirani vacuum transducer from the Analogline series incorporates an innovative, patented measurement principle. The proven Thyracont impulse Pirani offers an extended measurement range with enhanced resolution. This next-generation Pirani sensor features optimized temperature compensation, resulting in further improved accuracy and stability.

Both transducers monitor and control the operation of fore-vacuum and high-vacuum pump systems and regulate gas inlet when required by the process.