Benefits VSH at a glance:
- Wide range combination sensor Pirani / Bayard Alpert
- Bayard Alpert with blowing resistant, yttrium coated double filament
- Longterm tests confirm excellent life time: up to 100,000 shock venting cycles
Thin film coatings
Bte Bedampfungstechnik GmbH coats glass, metal and plastic with optical functional layers. For this purpose, metals (gold, silver, aluminium) or so-called dielectrics (TiO2, SiO2) are vaporized in a high vacuum.
Challenge
In order to ensure a correct vaporization process, it is important to control and manage both the pressure in the fore-vacuum chamber and the pressure in the high vacuum chamber. Only if the pressure is within a defined range, a good quality of the vaporized products can be guaranteed.
Solution
To control the vacuum the transducers VSH88D (Pirani/hot cathode) and VSP63MV (Pirani, analogue) are used. These monitor and control the function of the fore and high vacuum pumping units and control and regulate the gas inlet if this is necessary for the process.