Capacitance Vacuum Transducer VCC200 – For Difficult Applications
Vacuum measurement in processes containing corrosive gases, oil vapor or particulates is often attempted with Pirani or convection-driven Pirani sensors. While such sensors exhibit reasonable accuracy, they will often fail due to process contaminants and require frequent replacement. Piezo-resistive sensors, while less sensitive to process contamination, lack the needed measurement accuracy.
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