Innovative, intelligent vacuum metrology is our aim. Learn more about our new products, where you can meet our staff and which projects we are committed to.
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Loadlocks in semiconductor manufacturing typically require multiple pressure sensors – resulting in integration effort, contamination risk, and unnecessary complexity. The VSL vacuum transducer replaces them with a single device, covering the entire measurement range from 1200 to 10⁻⁴ mbar. Fewer components. Less risk. Greater process reliability.
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Vacuum is invisible. Its impact is not. In semiconductor manufacturing, pharmaceutical production, coating technology, and research, precise vacuum measurement technology is critical to process stability, reproducibility, and reliability.
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