News

Vacuum Measurement in Loadlocks: One Sensor for the Entire Cycle

Loadlocks in semiconductor manufacturing typically require multiple pressure sensors – resulting in integration effort, contamination risk, and unnecessary complexity. The VSL vacuum transducer replaces them with a single device, covering the entire measurement range from 1200 to 10⁻⁴ mbar. Fewer components. Less risk. Greater process reliability.

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Importance of Vacuum Metrology in Thin Film Coating

Thin film coatings are indispensable today in numerous industries—from optics and electronics to sensor technology and renewable energy. Precise vacuum measurement technology forms the basis for reproducible processes and high coating quality.

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