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Loadlocks in semiconductor manufacturing typically require multiple pressure sensors – resulting in integration effort, contamination risk, and unnecessary complexity. The VSL vacuum transducer replaces them with a single device, covering the entire measurement range from 1200 to 10⁻⁴ mbar. Fewer components. Less risk. Greater process reliability.
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Thyracont Vacuum Instruments complements the well-proven Smartline product family with a new digital vacuum transducer. Especially developed for the purpose of measuring vacuum in loadlocks, the vacuum gauge is made to provide the optimal load lock venting and transfer conditions, to minimize process cycle times and to prevent contamination. The new vacuum transducer VSL measures absolute pressure in the range ...
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