Smartline
Intelligent vacuum transducers with digital interfaces
VSR: Piezo/Pirani 1200 – 1e-4 mbar
Vacuum transducer with combination sensors piezo resistive / heat conduction Pirani, dependent of gas type (900 - 1e-4 Torr)
VSL: Piezo/Pirani for loadlocks
Vacuum transducer with combination sensors: abs. 1200 bis 1e-4 mbar (900 - 1e-4 Torr) and rel. -1060 … +340 (-745 … +255 Torr) (depending on ambient pressure)
VSP: Pirani 1000 – 1e-4 mbar
VCP: Pirani for corrosive media 1000 – 5e-4 mbar
VSM: Pirani/ cold cathode 1000 – 5e-9 mbar
Vacuum transducer with combination sensors: heat conduction Pirani / cold cathode (inv. magnetron), dependent on gas type (750 - 5e-9 Torr)
VSI: Cold Cathode 2e-3 – 5e-9 mbar
Vacuum transducer cold cathode (inverted magnetron), dependent of gas type (1,5e-3- 5e-9 Torr)
VSH: Pirani/ hot cathode 1000 – 5e-10 mbar
Vacuum transducer with combination sensors: heat conduction Pirani / hot cathode (Bayard Alpert), dependent on gas type (750 - 5e-10 Torr)
Controller
Controller with 2 channels (VD12) or 4 channels (VD14)
