Smartline

Intelligent vacuum transducers with digital interfaces



VSR: Piezo/Pirani 1200 – 1e-4 mbar

Vacuum transducer with combination sensors piezo resistive / heat conduction Pirani, dependent of gas type (900 - 1e-4 Torr)


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VSL: Piezo/Pirani for loadlocks

Vacuum transducer with combination sensors piezo resistive / heat conduction Pirani, dependent of gas type (900 - 1e-4 Torr)


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VSP: Pirani 1000 – 1e-4 mbar

Vacuum transducer with heat conduction Pirani, dependent of gas type (750 - 1e-4 Torr)

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VCP: Pirani for corrosive media 1000 – 5e-4 mbar

Vacuum transducer with heat conduction Pirani, dependent of gas type (750 - 1e-4 Torr)

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VSM: Pirani/ cold cathode 1000 – 5e-9 mbar

Vacuum transducer with combination sensors: heat conduction Pirani / cold cathode (inv. magnetron), dependent on gas type (750 - 5e-9 Torr)


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VSI: Cold Cathode 2e-3 – 5e-9 mbar

Vacuum transducer cold cathode (inverted magnetron), dependent of gas type (1,5e-3- 5e-9 Torr)


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VSH: Pirani/ hot cathode 1000 – 5e-10 mbar

Vacuum transducer with combination sensors: heat conduction Pirani / hot cathode (Bayard Alpert), dependent on gas type (750 - 5e-10 Torr)


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Controller

Controller with 2 channels (VD12) or 4 channels (VD14)


 
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