VSL Vacuum Transducers for loadlocks ● abs. 1200 bis 1e-4 mbar ● rel. -1060 … +340 mbar ● digital
€ 652.00 – € 1,006.00 excl. VAT and transport costs
The vacuum transducer VSL has been developed especially for loadlocks. The metal sealed gauge uses a multi sensor technology and combines two piezos with a Pirani sensor. Therefore, the vacuum transducer measures absolute pressure in the range of 1200 …1e-4 mbar as well as relative pressure in relation to the environment in the range of -1060 … +340 mbar.
The vacuum transducer VSL has been developed especially for loadlocks. The metal sealed gauge uses a multi sensor technology and combines two piezos with a Pirani sensor. Therefore, the vacuum transducer measures absolute pressure in the range of 1200 …1e-4 mbar as well as relative pressure in relation to the environment in the range of -1060 … +340 mbar.
Overview Smartline vacuum transducers:
- Variety of interfaces: Digital RS485 interfaces plus 0-10 V output signal, EtherCAT or PROFINET. The Bluetooth adapter SLKBT enables wireless communication
- Industry 4.0: All Smartline transducers offer a series of parameters for preventive maintenance. PROFINET transducers are able to communicate with OPC UA servers and support MRP
- Exchangeable sensor heads: Is an easy job, independent of the gauge manufacturer and without programming effort. If the existing cables shall further be used, suitable adapters (e. g. FCC68) will be available.
- Optional display: Large LCD display (exc. EtherCAT, PROFINET)
- Easy adjustment: Readjustment of zero and atmosphere by push-button or interface
- LEDs: For device status and switch points
- Scaleable output characteristics: The 0-10 V output signal can be scaled according to the required output characteristics. Thus an exchange of existing vacuum gauges is easily, independent of the manufacturer and without programming effort possible. If the cable needs to remain but the transducer should be changed adapters (e. g. FCC68) are available.
- UHV suitable: Metal sealed stainless steel sensor cell,suitable for UHV applications (He leackage rate <5e-10 mbar l / s)
- Relay switch points: Two independent, potentialfree relay switch points (exc. EtherCAT, PROFINET)
- Robust: Resistant, EMC compatible metal housing, protection class up to IP54
- Controller: Expansion with 2 channel controller VD12 or 4 channel controler VD14 possible
- VacuGraphTM Windows software: For visualisation, analysis and storage of measuring data
Overview VSL vacuum transducer with Piezo/Pirani multi sensor:
- Integrated multi sensor system: Two piezo diaphragm sensors to monitor chamber pump-down and vent-up ; Pirani sensor measuring down to 10-4 mbar controls low-pressure transfer between loadlock and process chamber minimizing particle events
- On the point: Differential pressure output for precisely triggering door-open function
- Precise: High accuracy, optimal resolution and excellent stability
- Fast: Short response time of up to 40 ms
- Stable readings: Due to optimized temperature compensation
- Independent of gas type: Measurements independent of gas type above 20 mbar
Do you have questions regarding our VSL vacuum transducers which combines two piezos and a Pirani sensor? We will be pleased to assist.
Attention: If the Smartline transducer is used without PLC, an SLN4 power supply will be required.
→ Go to all transducers of the Smartline | → Go to accessories for all Smartline vacuum transducers
Weight | 1.1 kg |
---|---|
Dimensions | 25 × 16 × 9 cm |
Measurement principle | |
Gas dependency | depending on gas type, independent of gas type (Piezo) |
Measurement range mbar | Relative pressure -1060 … +340 mbar (depending on ambient pressure) |
Measurement range Torr | 900 – 1e-4 Torr, Relative pressure: -795 … +255 Torr |
max. overload | 4 bar abs. |
Accuracy | 1200 – 40 mbar: 0.3 % f.s. | 40 – 2e-3 mbar: 10 % f.r., Relative pressure: 0,25 % f. span |
Repeatability | 1200 – 40 mbar: 0.1% f.s. | 40 – 1e-2 mbar: 2 % f.r. |
Materials in contact with vacuum | Stainless steel 1.4307, tungsten, nickel, glass, gold, silicon oxide |
Response time | 40 ms |
Operating temperature | +5…+60 °C |
Storage temperature | -40…+65 °C |
Bake out temperature | |
Voltage supply | 20 – 30 VDC |
Power consumption | Max. 2.5 W, add. 0.8 W f. EtherCAT/relays/ LCD, add. 1.6 W for Profinet |
Output Signal SL | 0 – 10 VDC, min. 10 kΩ, measuring range 1,5 – 8,58 VDC, log. except EtherCAT, Profinet |
Serial interface | EtherCAT, Profinet, RS485: 9,6 kBd to 115 kBd, 8 databit, 1 stopbit, no parity EtherCAT, Profinet |
Switching output | 2x relay, pot. free, 50 VAC / 2 A or 30 VDC / 2 A, max. 60 VA, except EtherCAT and Profinet |
Electrical connection | RS485/0-10V: SubD, 15-pole, male, RS485/EtherCAT/Profinet: 1x M12 A / 2x M12 D female |
Vacuum connection | DN 16 ISO-KF (VSL53), DN 16 CF-F (VSL54) |
Protection class | |
Certification | CSA, UL (cCSAus) |
Dimensions | 99 x 69 x 48 mm (VSL53) |
Weight | 195 g (VSL53) |
Smartline - product brochure | |
VacuGraph software (free Lite-Version) | |
Data sheets, manuals, 3D models and more |
How can I set parameters like switching points or gas type correction factors? The Smartline vacuum transducers are programmed via their RS485 interface. They respond e. g. on type requests, measurement requests, adjustment commands and commands forsetting gas type correction factors. It is also possible to program both relay switching points of the gauge via RS485. |
Is the measuring signal independent of the gas type within the rough vacuum range? Yes, in the pressure range above 15 mbar. |
Is the Pirani sensor protected against pollution and dirt? All Thyracont Pirani sensors are fitted with a cover which protects against basic condensation and pollution. If the sensors are used in an extremely polluted environment, it is advised to additionally either use an extension pipe, an elbow fitting, a cooling trap or a seal ring with a sinter filter. We recommend keeping the transducer switched on permanently, as a hot Pirani filament is less susceptible to contamination. |
Is it possible to clean the Pirani sensor? Depending on the type and intensity of the pollution, it is feasible to clean the sensor with isopropanol. To do so, you need to fill the measuring cell completely with isopropanol and let it rest for a few minutes. After removing the fluid, the measuring must dry out completely. Please note that if e.g. oil debris is baked onto the filament, it is very difficult or even impossible to clean. |
Do I have to mount the instrument in a specific position? In principle, the devices can be installed in any position. You will achieve the most accurate measurement results if the flange of the device is horizontal, as the devices have been calibrated in this position. Mounting the sensor from below is not recommended, as condensation and dirt can collect in the measuring cell. |
How often do I need to recalibrate the vacuum transducer? The period between calibrations depends on the specific application. In particular, deposits and dirt in the sensor, but also use under extreme temperature conditions, can make readjustment necessary. For quality assurance, we recommend sending the devices in for calibration every one or two years. We offer a factory calibration (article no. ADJCERT) or a DAkkS calibration (article no. DKDCERT). |
How can I change the sensor heads of the transducers? The replaceable, pre-adjusted sensor heads of the Smartline transmitters can be replaced quickly and easily by the user to ensure consistently high system availability. To do this, the fixing screws of the sensor head are loosened, the sensor unit replaced and the screws refastened. After a warm-up time of approx. 15 minutes, press the Adjust button. The sensors and electronics are now automatically adjusted to each other and the transmitter is ready for operation. |
When to use a hot cathode and when to use a cold cathode? Hot cathode transducers are mainly used for measurements where high precision (<15%) is required. We also recommend our hot cathode for measurements in the ultra-high-vacuum range down to 5e-10 mbar. Cold cathode transducers are more robust in numerous applications and therefore particularly interesting for applications where the sensor is exposed to dust, oil or other pollution. The cold cathode measuring cell can be patrially dismantled and cleaned (e.g. with Scotch Brite). Compared to the VSH, the VSM has a lower, but for a cold cathode very good accuracy of <25%. To ensure high system availability, the sensor head of both transmitters can be easily replaced if necessary. |
Is it possible to clean the sensor head of the VSM? Yes, it is possible to partly dismantle the sensor head and to carefully clean it with Scotch Brite. Thereby, metallic debris and minor pollution can be easily removed. |
Is it possible to clean the sensor head of the VSH? Hot cathode sensors are not suited for cleaning. |
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