VSL Vacuum Transducers for loadlocks ● abs. 1200 bis 1e-4 mbar ● rel. -1060 … +340 mbar ● digital

 569.00 916.00 excl. VAT and transport costs

The vacuum transducer VSL  has been developed especially for loadlocks. The metal sealed gauge uses a multi sensor technology and combines two piezos with a Pirani sensor. Therefore, the vacuum transducer measures absolute pressure in the range of 1200 …1e-4 mbar as well as relative pressure in relation to the environment in the range of -1060 … +340 mbar.

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The vacuum transducer VSL  has been developed especially for loadlocks. The metal sealed gauge uses a multi sensor technology and combines two piezos with a Pirani sensor. Therefore, the vacuum transducer measures absolute pressure in the range of 1200 …1e-4 mbar as well as relative pressure in relation to the environment in the range of -1060 … +340 mbar.

Overview VSL vacuum transducer with Piezo/Pirani multi sensor:

  • Integrated multi sensor system: Two piezo diaphragm sensors to monitor chamber pump-down and vent-up
; Pirani sensor measuring down to 10-4 mbar controls low-pressure transfer between loadlock and process chamber minimizing particle events
  • On the point: Differential pressure output for precisely triggering door-open function
  • Precise: High accuracy, optimal resolution and excellent stability
  • Fast: Short response time of up to 40 ms
  • Stable readings: Due to optimized temperature compensation
  • Independent of gas type: Measurements independent of gas type above 20 mbar

Overview Smartline vacuum transducers:

  • Variety of interfaces: Digital RS485 interfaces plus 0-10 V output signal, EtherCAT or Profinet. The Bluetooth adapter SLKBT enables wireless communication
  • Exchangeable sensor heads: Is an easy job, independent of the gauge manufacturer and without programming effort. If the existing cables shall further be used, suitable adapters (e. g. FCC68) will be available.
  • Optional display: Large LCD display (exc. EtherCAT, Profinet)
  • Easy adjustment: Readjustment of zero and atmosphere by push-button or interface
  • LEDs: For device status and switch points
  • Scaleable output characteristics: The 0-10 V output signal can be scaled according to the required output characteristics. Thus an exchange of existing vacuum gauges is easily, independent of the manufacturer and without programming effort possible. If the cable needs to remain but the transducer should be changed adapters (e. g. FCC68) are available.
  • UHV suitable: Metal sealed stainless steel sensor cell,suitable for UHV applications (He leackage rate <5e-10 mbar l / s)
  • Relay switch points: Two independent, potentialfree relay switch points (exc. EtherCAT, Profinet)
  • Robust: Resistant, EMC compatible metal housing, protection class up to IP54
  • Controller: Expansion with 2 channel controller VD12 or 4 channel controler VD14 possible
  • VacuGraphTM Windows software: For visualisation, analysis and storage of measuring data

Do you have questions regarding our VSL vacuum transducers which combines two piezos and a Pirani sensor? We will be pleased to assist.

→ Go to all transducers of the Smartline

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