VSL5xD Vacuum Transducers for loadlocks ● RS485 ● abs. 1200 bis 1e-4 mbar ● rel. -1060 … +340 mbar

 569.00 589.00 excl. VAT and transport costs

The vacuum transducer VSL  has been developed especially for loadlocks. The metal sealed gauge uses a multi sensor technology and combines two piezos with a Pirani sensor. Therefore, the vacuum transducer measures absolute pressure in the range of 1200 …1e-4 mbar as well as relative pressure in relation to the environment in the range of -1060 … +340 mbar.
The VSL is available in KF and CF variations and with different interfaces.

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Additional information

Weight1.1 kg
Dimensions25 x 16 x 9 cm
Measurement principle

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Gas dependency

depending on gas type, independent of gas type (Piezo)

Measurement range mbar

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Measurement range Torr

900 – 1e-4 Torr, Relative pressure: -795 … +255 Torr

max. overload

4 bar abs.

Accuracy

1200 – 40 mbar: 0.3 % f.s. | 40 – 2e-3 mbar: 10 % f.r., Relative pressure: 0,25 % f. span

Repeatability

1200 – 40 mbar: 0.1% f.s. | 40 – 1e-2 mbar: 2 % f.r.

Materials in contact with vacuum

Stainless steel 1.4307, tungsten, nickel, glass, gold, silicon oxide

Response time

40 ms

Operating temperature

+5…+60 °C

Storage temperature

-40…+65 °C

Bake out temperature

Voltage supply

20 – 30 VDC

Power consumption

Max. 2.5 W, add. 0.8 W f. EtherCAT/relays/ LCD, add. 1.6 W for Profinet

Output Singal SL

0 – 10 VDC, min. 10 kΩ, measuring range 1,5 – 8,58 VDC, log. except EtherCAT, Profinet

Serial interface

Switching output

2x relay, pot. free, 50 VAC / 2 Aor 30 VDC / 2 A, max. 60 VA, except EtherCAT and Profinet

Electrical connection

Article Number (choice of vacuum connection):

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Protection class

Dimensions

99 x 69 x 48 mm (VSL53)

Weight

195 g (VSL53)

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